2D material preparation equipment

Two-dimensional material growth CVD system

Main features:

Ø Equipped with a preheating furnace for evaporating solid state sources

Ø Uses a slide furnace to achieve rapid heating/cooling and shorten the experiment time.

Ø The flange end is sealed by a clamp, which makes the feeding and discharging more convenient.

Ø Gas supply system can be configured with several mass flow meters according to the customer's experimental requirements. The flow meter's range can also be selected in different configurations. The vacuum system can also be configured with various vacuum pumps according to customer requirements.

 


Technical Parameters

Preheating Furnace

Max. Temp

400°C

zone length

100mm

Heating furnace

Max. Temp

1200°C

Power

2KW (220V)

Heating zone length

Heating440mm

Constant200mm



Temperature Controller

 

PID automatic control and auto-tune function.

30 programmable segments for precise thermal processing.

Built-in protection for the over-heated and broken thermocouple. 

 

Heating Elements

 

· Resistance wire, Fe-Cr-Al Alloy doped by Mo

 

Temperature Accuracy

+/- 1 °C

Processing tube

 

Size:Φ50*1650mm

Gas supply system

Connector style

Double cutting ferrule stainless steel connector

)Standard range(N2)

50sccm100sccm200sccm500sccm optional

Accuracy

· ±1.5%FS

Response time

Gas characteristics14sec

Electrical characteristics:10sec

Linearity

±0.51.5%

Working pressure difference range

 

0.10.5MPa

Max. pressure

 

· 3MPa

Pressure vacuum gauge

0.10.15 MPa, 0.01 MPa/grid

Vacuum unit

Relative air humidity

85%

pumping

10m³/h

vacuum

10-1Pa

Oil capacity

1.1L

Rotation rate

1450rpm

Noise

50dB


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