Two-dimensional material growth CVD system
Ø Equipped with a preheating furnace for evaporating solid state sources
Ø Uses a slide furnace to achieve rapid heating/cooling and shorten the experiment time.
Ø The flange end is sealed by a clamp, which makes the feeding and discharging more convenient.
Ø Gas supply system can be configured with several mass flow meters according to the customer's experimental requirements. The flow meter's range can also be selected in different configurations. The vacuum system can also be configured with various vacuum pumps according to customer requirements.
Heating zone length
l PID automatic control and auto-tune function.
l 30 programmable segments for precise thermal processing.
l Built-in protection for the over-heated and broken thermocouple.
· Resistance wire, Fe-Cr-Al Alloy doped by Mo
+/- 1 °C
Gas supply system
Double cutting ferrule stainless steel connector
Working pressure difference range
Pressure vacuum gauge
－0.1～0.15 MPa, 0.01 MPa/grid
Relative air humidity