Graphene preparation equipment

Plasma enhanced rotational PECVD system

 

Main features:

 

Ø The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .

 

Ø Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to  35 degree.

 

Ø Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.


Technical Parameters

Furnace

Max. Temp

1200°C

Heating zone length

440mm

Constant zone length

200mm



Temperature Controller

 

PID automatic control and auto-tune function.

30 programmable segments for precise thermal processing.

Built-in protection for the over-heated and broken thermocouple. 

Operation interface is 7 "industrial control computer

 

Heating Elements

 

· Resistance wire, Fe-Cr-Al Alloy doped by Mo

Temperature Accuracy

 

+/- 1 °C

Processing tube

 

Size:Φ60*420+Φ100*360+Φ60*420mm

Furnace tube rotation rate3~13r/min

Furnace body inclination angle

0~35°(adjustable

PE source PE

Signal frequency

13.56 MHz±0.005%

Power output range

0-500W

 

RF output interface

50 Ω, N-type, female

Power stability

5W

Gas supply system

High precision mass FlowmeterRange optional


Accuracy

±1.5%

Response accuracy

 

· ±0.2%

Response time

 

Gas characteristics14sec

Electrical characteristics:10sec

 

Working pressure difference range

 

0.10.5MPa

Max. pressure

 

· 3MPa

Connection 

 

Φ6mmDouble clasp stainless steel joint

Vacuum  unit

KF25 series bellows and manual stopper valves

Vacuum up to10-1Pa

The value can be displayed intuitively by the digital display vacuum tester

 


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