Graphene preparation equipment

Plasma enhanced rotational PECVD system


Main features:


Ø The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .


Ø Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to  35 degree.


Ø Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.

Technical Parameters


Max. Temp


Heating zone length


Constant zone length


Temperature Controller


PID automatic control and auto-tune function.

30 programmable segments for precise thermal processing.

Built-in protection for the over-heated and broken thermocouple. 

Operation interface is 7 "industrial control computer


Heating Elements


· Resistance wire, Fe-Cr-Al Alloy doped by Mo

Temperature Accuracy


+/- 1 °C

Processing tube



Furnace tube rotation rate3~13r/min

Furnace body inclination angle


PE source PE

Signal frequency

13.56 MHz±0.005%

Power output range



RF output interface

50 Ω, N-type, female

Power stability


Gas supply system

High precision mass FlowmeterRange optional



Response accuracy


· ±0.2%

Response time


Gas characteristics14sec

Electrical characteristics:10sec


Working pressure difference range



Max. pressure


· 3MPa



Φ6mmDouble clasp stainless steel joint

Vacuum  unit

KF25 series bellows and manual stopper valves

Vacuum up to10-1Pa

The value can be displayed intuitively by the digital display vacuum tester


Related Products:

Online Inquiry