Plasma enhanced rotational PECVD system
Ø The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .
Ø Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to 35 degree.
Ø Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.
Heating zone length
Constant zone length
l PID automatic control and auto-tune function.
l 30 programmable segments for precise thermal processing.
l Built-in protection for the over-heated and broken thermocouple.
l Operation interface is 7 "industrial control computer
· Resistance wire, Fe-Cr-Al Alloy doped by Mo
+/- 1 °C
Furnace tube rotation rate：3~13r/min
Furnace body inclination angle
PE source PE
Power output range
RF output interface
50 Ω, N-type, female
Gas supply system
High precision mass Flowmeter（Range optional）
Working pressure difference range
Φ6mmDouble clasp stainless steel joint
KF25 series bellows and manual stopper valves
Vacuum up to10-1Pa
The value can be displayed intuitively by the digital display vacuum tester